Alteration in growth temperatures of metal-organic decomposed GaxCe1-xOyNz passivation layer in nitrogen/oxygen/nitrogen ambient
Kammutty Musliyarakath Abdul Shekkeer, Junchen Deng, Kuan Yew Cheong, Kadiarakath Manathparambil Riyas, Hock Jin Quah
Topics & Concepts
PassivationMaterials scienceNitrogenDangling bondOxygenAnnealing (glass)Inorganic chemistryOxideMetalForming gasLayer (electronics)Substrate (aquarium)Analytical Chemistry (journal)Chemical engineeringSiliconNanotechnologyMetallurgyChemistryEnvironmental chemistryOrganic chemistryOceanographyEngineeringGeologySemiconductor materials and devicesSemiconductor materials and interfacesElectronic and Structural Properties of Oxides