Surface quality and material removal rate in nanoscale micro-laser aided polishing on AlN monocrystal via thermal effect
Tan-Tai Do, Te‐Hua Fang
Topics & Concepts
PolishingMaterials scienceNanoscopic scaleThermalSurface (topology)LaserComposite materialMetallurgyOptoelectronicsNanotechnologyOpticsGeometryMeteorologyPhysicsMathematicsAdvanced Surface Polishing TechniquesMetal and Thin Film MechanicsDiamond and Carbon-based Materials Research