Constructing a correlation between ferroelectricity and grain sizes in Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> ferroelectric thin films
Haiyan Chen, Hang Luo, Xi Yuan, Dou Zhang
Abstract
A correlation between ferroelectricity and grain sizes was constructed through controlling process conditions including annealing conditions and film thickness.
Topics & Concepts
FerroelectricityAnnealing (glass)Materials scienceGrain sizeThin filmCrystallographyCondensed matter physicsMineralogyOptoelectronicsComposite materialNanotechnologyChemistryPhysicsDielectricFerroelectric and Negative Capacitance DevicesMXene and MAX Phase MaterialsFerroelectric and Piezoelectric Materials