Investigations on thermal effects on scratch behavior of monocrystalline silicon via molecular dynamics simulation
Yihan Niu, Dan Zhao, Shunbo Wang, Shichao Li, Zhaoxin Wang, Hongwei Zhao
Topics & Concepts
Monocrystalline siliconMaterials scienceScratchSiliconAmorphous solidMolecular dynamicsAmorphous siliconThermalThermal stabilityCrystalline siliconComposite materialCrystallographyChemical engineeringMetallurgyThermodynamicsComputational chemistryEngineeringPhysicsChemistryAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchIntegrated Circuits and Semiconductor Failure Analysis