Influence of Si addition on the phase structure and oxidation behavior of PVD AlTiN and AlTiCrN coatings using high-resolution characterization techniques
M-R. Alhafian, Nathalie Valle, Jean‐Baptiste Chemin, Laure Bourgeois, M. Penoy, Ralph Useldinger, Jaâfar Ghanbaja, Frank Mücklich, Patrick Choquet
Topics & Concepts
Materials scienceCoatingCrystalliteCrystallinityOxideNanoindentationPhase (matter)NitrideComposite materialLayer (electronics)MetallurgyChemistryOrganic chemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devices