Litcius/Paper detail

A stacking ensemble classifier with handcrafted and convolutional features for wafer map pattern classification

Hyungu Kang, Seokho Kang

2021Computers in Industry51 citationsDOI

Topics & Concepts

StackingClassifier (UML)Artificial intelligenceComputer scienceConvolutional neural networkWaferPattern recognition (psychology)AutomationSemiconductor device fabricationEnsemble learningMachine learningData miningEngineeringNuclear magnetic resonanceElectrical engineeringPhysicsMechanical engineeringIndustrial Vision Systems and Defect DetectionAdvancements in Photolithography TechniquesImage and Object Detection Techniques