Failure mechanisms of multilayer TiN films based on mechanical properties of film and substrate
Biao Si, Linfan Sun, Zhuo Zhao, Yanwen Zhou, Yanwen Zhou, Yangtao Zhou, Yangtao Zhou
Topics & Concepts
TinMaterials scienceLayer (electronics)Substrate (aquarium)Composite materialElastic modulusBrittlenessSputter depositionMetallurgySputteringThin filmNanotechnologyGeologyOceanographyMetal and Thin Film MechanicsMetal Alloys Wear and PropertiesDiamond and Carbon-based Materials Research