Preparation of YbAlN piezoelectric thin film by sputtering and influence of Yb concentration on properties and crystal structure
Masato Uehara, Yuki Amano, Sri Ayu Anggraini, Kenji Hirata, Hiroshi Yamada, Morito Akiyama
Topics & Concepts
Materials scienceDopantScandiumSputteringDopingNitridePiezoelectricityThin filmDiffractionCrystal (programming language)Crystal structureAluminiumYtterbiumNanotechnologyAnalytical Chemistry (journal)OptoelectronicsCrystallographyComposite materialMetallurgyOpticsLayer (electronics)PhysicsChemistryComputer scienceProgramming languageChromatographyAcoustic Wave Resonator TechnologiesGaN-based semiconductor devices and materialsFerroelectric and Piezoelectric Materials