Ion Irradiation of Dielectrics for Photonic Applications
Feng Chen, H. Amekura, Yuechen Jia
Topics & Concepts
IrradiationIonDielectricOptoelectronicsPhotonicsMaterials scienceComputer sciencePhysicsNuclear physicsQuantum mechanicsIntegrated Circuits and Semiconductor Failure AnalysisOptical Coatings and GratingsThin-Film Transistor Technologies