Wet etch, dry etch, and MacEtch of β-Ga2O3: A review of characteristics and mechanism

Hsien-Chih Huang, Zhongjie Ren, Clarence Chan, Xiuling Li

2021Journal of materials research/Pratt's guide to venture capital sources43 citationsDOI

Topics & Concepts

Etching (microfabrication)Materials scienceDry etchingReactive-ion etchingIsotropic etchingOptoelectronicsBand gapNanotechnologyUltravioletLayer (electronics)Ga2O3 and related materialsAdvanced Photocatalysis TechniquesZnO doping and properties