In-situ growth of porous Cu3(BTC)2 on cellulose nanofibrils for ultra-low dielectric films with high flexibility
Rui Liu, Xiang He, Miao Miao, Shaomei Cao, Xin Feng
Topics & Concepts
Materials scienceDielectricCelluloseComposite materialThermal stabilityPorosityDielectric lossChemical engineeringDissipation factorMicroelectronicsNanotechnologyOptoelectronicsEngineeringCopper Interconnects and ReliabilityDielectric materials and actuatorsAdvanced Cellulose Research Studies