A virtual metrology method with prediction uncertainty based on Gaussian process for chemical mechanical planarization
Haoshu Cai, Jianshe Feng, Qibo Yang, Wenzhe Li, Xiang Li, Jay Lee
Topics & Concepts
Chemical-mechanical planarizationGaussian processKrigingMetrologyComputer scienceProcess (computing)Data miningArtificial neural networkFuse (electrical)Artificial intelligenceMachine learningGaussianEngineeringStatisticsMathematicsPolishingPhysicsElectrical engineeringOperating systemQuantum mechanicsMechanical engineeringAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationMineral Processing and Grinding