Atmospheric pressure spatial ALD of Al2O3 thin films for flexible PEALD IGZO TFT application
Kwang Su Yoo, Dong-Gyu Kim, Seung-Hwan Lee, Won-Bum Lee, Jin‐Seong Park
Topics & Concepts
Materials scienceThin-film transistorAtomic layer depositionOptoelectronicsAtmospheric pressureInsulator (electricity)Threshold voltageSubstrate (aquarium)Thin filmTransistorComposite materialLayer (electronics)NanotechnologyVoltageElectrical engineeringOceanographyGeologyEngineeringSemiconductor materials and devicesThin-Film Transistor TechnologiesZnO doping and properties