A new chemo-mechanical slurry for close-to-atomic scale polishing of LiNbO3 crystal
Jiang Guo, Haohao Shi, Zhen Tong, Lin Li
Topics & Concepts
PolishingSlurryNanosheetMaterials scienceChemical-mechanical planarizationOxideNanoscopic scaleNanometreCrystal (programming language)Composite materialChemical engineeringMetallurgyNanotechnologyProgramming languageEngineeringComputer scienceSemiconductor materials and devicesDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing Techniques