The Development Progress of Surface Structure Diffraction Gratings: From Manufacturing Technology to Spectroscopic Applications
Ye Wang, Xiuhua Fu, Yongyi Chen, Qin Li, Yongqiang Ning, Lijun Wang
Abstract
The high-precision diffraction grating is an important chromatic dispersion component that has been widely used in many fields, including laser beam combining, chirped pulse compression, spectroscopy, among others. In this paper, we review the development status of reflection and transmission gratings with high diffraction efficiency and high laser-induced damage thresholds, such as metal-film and multilayer-dielectric-film gratings. Then, we review the basic principles and most recent stages in the development of manufacturing techniques, such as mechanical scribing, holographic exposure, electron-beam lithography, and nanoimprinting.
Topics & Concepts
Materials scienceOpticsDiffraction gratingDiffraction efficiencyGratingHolographyDiffractionLithographyOptoelectronicsElectron-beam lithographyReflection (computer programming)NanotechnologyResistComputer sciencePhysicsProgramming languageLayer (electronics)Optical Coatings and GratingsLaser Material Processing TechniquesAdvanced Surface Polishing Techniques