Litcius/Paper detail

In-situ characterization of thermomechanical behavior of copper nano-interconnect for 3D integration

B. Ayoub, S. Moreau, S. Lhostis, H. Frémont, Sébastien Mermoz, Emeline Souchier, E. Deloffre, S. Escoubas, Thomas W. Cornelius, Ο. Thomas

2022Microelectronic Engineering15 citationsDOIOpen Access PDF

Topics & Concepts

Materials scienceInterconnectionComposite materialAnisotropyNanocrystalline materialSynchrotronCopperNanotechnologyMetallurgyOpticsComputer sciencePhysicsComputer networkAluminum Alloys Composites Properties3D IC and TSV technologiesMicrostructure and mechanical properties