Epitaxy N-polar GaN on vicinal Sapphire substrate by MOCVD
Yangfeng Li, Xiaotao Hu, Yimeng Song, Zhaole Su, Wenqi Wang, Haiqiang Jia, Wenxin Wang, Yang Jiang, Hong Chen
Topics & Concepts
Metalorganic vapour phase epitaxyVicinalSapphireMaterials scienceEpitaxyChemical vapor depositionTransmission electron microscopyHigh-resolution transmission electron microscopyGallium nitrideScanning electron microscopeThin filmPhotoluminescenceSubstrate (aquarium)OptoelectronicsAnalytical Chemistry (journal)ChemistryOpticsNanotechnologyLaserLayer (electronics)Composite materialPhysicsGeologyOrganic chemistryOceanographyChromatographyGaN-based semiconductor devices and materialsAcoustic Wave Resonator TechnologiesZnO doping and properties