Laser-induced localized and maskless electrodeposition of micro-copper structure on silicon surface: Simulation and experimental study
Hao Zhu, Min Zhang, Weichao Ren, Viboon Saetang, Jinzhong Lu, Yucheng Wu, Kun Xu, Yang Liu, Zhaoyang Zhang, Zhaoyang Zhang
Topics & Concepts
Materials scienceLaserSiliconCopperPulsed laser depositionIrradiationDeposition (geology)Scanning electron microscopeLayer (electronics)OptoelectronicsOpticsThin filmComposite materialNanotechnologyMetallurgySedimentNuclear physicsPaleontologyBiologyPhysicsNanowire Synthesis and ApplicationsLaser Material Processing TechniquesThin-Film Transistor Technologies