The sputter-based synthesis of tantalum oxynitride nanoparticles with architecture and bandgap controlled by design

Pavel Pleskunov, Tereza Košutová, Mykhailo Vaidulych, Daniil Nikitin, Zdeněk Krtouš, Suren Ali‐Ogly, Ksenia Kishenina, Renata Tafiichuk, Hynek Biederman, Ivan Gordeev, Jonas Drewes, Igor Barg, Franz Faupel, Miroslav Cieslar, Roman Yatskiv, Yuriy Pihosh, Vikas Nandal, Kazuhiko Seki, Kazunari Domen, Andrei Choukourov