Reversible bonding for microfluidic devices with UV release tape
Yin Yao, Li Lu, Jiaxi Jiang, Yajun Zhang, Guohua Chen, Yiqiang Fan
Topics & Concepts
Anodic bondingMaterials scienceMicrofluidicsAdhesiveWafer bondingSubstrate (aquarium)Direct bondingLayer (electronics)MicrofabricationComposite materialThermocompression bondingAdhesive bondingMicroelectromechanical systemsNanotechnologyWafer dicingWaferFabricationGeologyPathologyOceanographyMedicineAlternative medicineNanofabrication and Lithography TechniquesInnovative Microfluidic and Catalytic Techniques Innovation3D Printing in Biomedical Research