Remarkably stable high mobility self-aligned oxide TFT by investigating the effect of oxygen plasma time during PEALD of SiO2 gate insulator
Seong‐In Cho, Jong Beom Ko, Seung Hee Lee, Junsung Kim, Sang‐Hee Ko Park
Topics & Concepts
Thin-film transistorMaterials sciencePlasmaOxygenThreshold voltageOxideHydrogenAtomic layer depositionOptoelectronicsTransistorLayer (electronics)VoltageNanotechnologyChemistryMetallurgyElectrical engineeringOrganic chemistryQuantum mechanicsPhysicsEngineeringThin-Film Transistor TechnologiesSemiconductor materials and devicesZnO doping and properties