Atomic layer deposition (ALD) assisting the visibility of metal-organic frameworks (MOFs) technologies
Jianwei Ren, Tien‐Chien Jen
Topics & Concepts
Atomic layer depositionNanotechnologyMetal-organic frameworkMicroelectronicsVisibilityChemistryLayer (electronics)Materials scienceOrganic chemistryPhysicsOpticsAdsorptionMetal-Organic Frameworks: Synthesis and ApplicationsSemiconductor materials and devicesCatalytic Processes in Materials Science