Litcius/Paper detail

Wafer map defect recognition based on multi-scale feature fusion and attention spatial pyramid pooling

Shouhong Chen, Zhentao Huang, Tao Wang, Xingna Hou, Ma Jun

2023Journal of Intelligent Manufacturing36 citationsDOI

Topics & Concepts

WaferPyramid (geometry)Artificial intelligencePoolingConvolutional neural networkDeep learningSemiconductor device fabricationPattern recognition (psychology)Computer scienceFeature (linguistics)Artificial neural networkElectronic engineeringEngineeringMaterials scienceOptoelectronicsMathematicsGeometryPhilosophyLinguisticsIndustrial Vision Systems and Defect DetectionIntegrated Circuits and Semiconductor Failure AnalysisAdvancements in Photolithography Techniques
Wafer map defect recognition based on multi-scale feature fusion and attention spatial pyramid pooling | Litcius