Processing outcomes of atomic force microscope tip-based nanomilling with different trajectories on single-crystal silicon
Jiqiang Wang, Yongda Yan, Zihan Li, Yanquan Geng, Xichun Luo, Pengfei Fan
Topics & Concepts
Atomic force microscopySiliconMicroscopeMaterials scienceCrystal (programming language)NanotechnologyOpticsOptoelectronicsComputer sciencePhysicsProgramming languageForce Microscopy Techniques and ApplicationsAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure Analysis