Influence of N2 flow rate on microstructure and properties of CrNx ceramic films prepared by MPP technique at low temperature
Binhua Gui, Hui Zhou, Xingguang Liu, Kaifeng Zhang, Hanjun Hu, Lamaocao Yang, Yanshuai Zhang
Topics & Concepts
Materials scienceMicrostructureCeramicSputter depositionVolumetric flow rateSputteringAnalytical Chemistry (journal)Deposition (geology)Composite materialGrain sizeStoichiometryThin filmMetallurgyNanotechnologyThermodynamicsChemistryChromatographyPhysicsPaleontologyOrganic chemistrySedimentBiologyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchHigh-Temperature Coating Behaviors