Substrate temperature effects on PEALD HfAlO dielectric films for IGZO-TFT applications
Hanbin Chen, Chia‐Hsun Hsu, Wan-Yu Wu, Wenzhi Zhang, Jing Zhang, Xiaoying Zhang, Peng Gao, Dong‐Sing Wuu, Feng‐Min Lai, Shui‐Yang Lien, Wen‐Zhang Zhu
Topics & Concepts
Substrate (aquarium)DielectricMaterials scienceThin-film transistorOptoelectronicsEngineering physicsNanotechnologyPhysicsOceanographyLayer (electronics)GeologySemiconductor materials and devicesFerroelectric and Negative Capacitance DevicesThin-Film Transistor Technologies