Ultra-precision raster grinding of monocrystalline silicon biconical free-form optics using arc-shaped diamond grinding wheels
Sheng Wang, Qingliang Zhao, Bing Guo, Yongcheng Pan
Topics & Concepts
GrindingMonocrystalline siliconMaterials scienceDiamond turningRaster scanOpticsMachiningDiamondDiamond grindingRaster graphicsSurface roughnessGrinding wheelNanomanufacturingSiliconOptoelectronicsComposite materialMetallurgyComputer scienceNanotechnologyPhysicsArtificial intelligenceAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationLaser Material Processing Techniques