Molecular dynamics study of temperature effect on deformation behavior of m-plane 4H–SiC film by nanoindentation
Lianghao Xue, Gan Feng, Sheng Liu
Topics & Concepts
NanoindentationMaterials scienceIndentationNucleationDislocationComposite materialSlip (aerodynamics)Deformation (meteorology)Nanoscopic scaleDeformation mechanismMolecular dynamicsWork (physics)Condensed matter physicsNanotechnologyMicrostructureThermodynamicsChemistryComputational chemistryPhysicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchAdvanced Surface Polishing Techniques