Similarity matching of wafer bin maps for manufacturing intelligence to empower Industry 3.5 for semiconductor manufacturing
Chia-Yu Hsu, Wei-Ju Chen, Ju-Chien Chien
Topics & Concepts
Cluster analysisData miningIdentification (biology)Semiconductor device fabricationWafer fabricationComputer scienceSimilarity (geometry)Pattern recognition (psychology)WaferArtificial intelligenceIndustrial engineeringEngineeringImage (mathematics)BotanyBiologyElectrical engineeringIndustrial Vision Systems and Defect DetectionSurface Roughness and Optical MeasurementsManufacturing Process and Optimization