Resonant Rotational Reluctance Actuator for Large Range Scanning Mirrors
Daniel Pechgraber, Ernst Csencsics, Georg Schitter
Abstract
This article presents the design, manufacturing, and evaluation of a scanning mirror system based on a novel resonant rotational reluctance actuator. The system comprises a ferromagnetic mover with a 15-mm aperture, which is actuated by the reluctance force generated by an actuator coil, whose magnetic flux is guided via a ferromagnetic yoke. An integrated angular position sensor system based on optical proximity sensors enables feedback control of the scanning amplitude. The actuator design locates the ferromagnetic yoke on the side of the mover, allowing for a large scanning range of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex-math notation="LaTeX">$\mathbf {\pm 13.5}$</tex-math></inline-formula> <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex-math notation="LaTeX">$^\circ$</tex-math></inline-formula> mechanical with a scanning frequency of <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex-math notation="LaTeX">$\mathbf {223}$</tex-math></inline-formula> Hz. This outperforms the state-of-the-art systems in the performance metric scanning range times aperture size.