Crystal cleavage, periodic nanostructure and surface modification of SiC ablated by femtosecond laser in different media
Chen Wu, Xudong Fang, Qiang Kang, Hao Sun, Libo Zhao, Bian Tian, Ziyan Fang, Maolin Pan, Ryutaro Maeda, Zhuangde Jiang
Topics & Concepts
Materials scienceFemtosecondLaserLaser ablationSurface roughnessAblationIsotropic etchingSapphireSurface finishOptoelectronicsIrradiationOpticsEtching (microfabrication)NanotechnologyComposite materialAerospace engineeringPhysicsEngineeringLayer (electronics)Nuclear physicsLaser Material Processing TechniquesLaser-induced spectroscopy and plasmaDiamond and Carbon-based Materials Research