Experimental and density functional theory study of benzohydroxamic acid as a corrosion inhibitor in chemical mechanical polishing of Co interconnects
Jingwei Cao, Qi Liu, Rongyang Xia, Guofeng Pan, Lianjun Hu, Yuhang Qi
Topics & Concepts
Chemical-mechanical planarizationAdsorptionPolishingChemisorptionMaterials scienceWaferDensity functional theoryLangmuir adsorption modelCorrosionDielectric spectroscopyCorrosion inhibitorChemical engineeringMoleculeElectrochemistryChemistryComposite materialPhysical chemistryNanotechnologyComputational chemistryOrganic chemistryElectrodeEngineeringAdvanced Surface Polishing TechniquesSemiconductor materials and devicesElectrodeposition and Electroless Coatings