A precision positioning rotary stage driven by multilayer piezoelectric stacks
Ruixuan Liu, Zhiyi Wen, Teng Cao, Chunyao Lu, Boquan Wang, Dawei Wu, Xiaoniu Li
Topics & Concepts
Rotor (electric)StatorVoltageStage (stratigraphy)PiezoelectricityPrecision engineeringMechatronicsVibrationAccuracy and precisionAcousticsEngineeringComputer scienceMechanical engineeringElectrical engineeringPhysicsMiniaturizationQuantum mechanicsBiologyPaleontologyPiezoelectric Actuators and ControlAdvanced Measurement and Metrology TechniquesIterative Learning Control Systems