Litcius/Paper detail

Growth of ultrathin Al2O3 islands on hBN particles by atomic layer deposition in a custom fluidized bed reactor using Al(CH3)3 and H2O

Alper Uğur, Umut Savacı, Nuran Ay, Servet Turan

2020Applied Surface Science13 citationsDOI

Topics & Concepts

Atomic layer depositionFluidized bedMaterials scienceDeposition (geology)Chemical vapor depositionSubstrate (aquarium)Layer (electronics)Boron nitrideGrowth rateIsland growthChemical engineeringAnalytical Chemistry (journal)NanotechnologyEpitaxyChemistryChromatographyOrganic chemistryOceanographySedimentGeologyMathematicsPaleontologyGeometryEngineeringBiologySemiconductor materials and devicesElectronic and Structural Properties of OxidesAdvancements in Semiconductor Devices and Circuit Design
Growth of ultrathin Al2O3 islands on hBN particles by atomic layer deposition in a custom fluidized bed reactor using Al(CH3)3 and H2O | Litcius