Litcius/Paper detail

Single crystalline β-Ga2O3 homoepitaxial films grown by MOCVD

Zeming Li, Teng Jiao, Jiaqi Yu, Daqiang Hu, Yuanjie Lv, Wancheng Li, Xin Dong, Baolin Zhang, Yuantao Zhang, Zhihong Feng, Guoxing Li, Guotong Du

2020Vacuum72 citationsDOI

Topics & Concepts

Metalorganic vapour phase epitaxyFull width at half maximumChemical vapor depositionMaterials scienceLattice constantDiffractionEpitaxyGalliumThin filmLuminescenceAnalytical Chemistry (journal)Substrate (aquarium)Root mean squareSurface roughnessCrystallographyChemistryOpticsNanotechnologyOptoelectronicsLayer (electronics)MetallurgyComposite materialChromatographyElectrical engineeringGeologyPhysicsOceanographyEngineeringGa2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques
Single crystalline β-Ga2O3 homoepitaxial films grown by MOCVD | Litcius