Effect of low-pressure deposition on the mechanical and tribological properties of a-C:H films deposited via modified pulsed-DC PECVD with active screen as an additional cathode
Ariel Capote, G. Capote, E.J. Corat, V.J. Trava-Airoldi
Topics & Concepts
Plasma-enhanced chemical vapor depositionMaterials scienceTribologyChemical vapor depositionAmorphous solidThin filmCarbon filmDiamond-like carbonComposite materialDeposition (geology)Amorphous carbonCarbon fibersNanotechnologyComposite numberChemistryPaleontologySedimentBiologyOrganic chemistryDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsHigh-pressure geophysics and materials