Selective wet etching in fabricating SiGe nanowires with TMAH solution for gate-all-around MOSFETs

Xiaohong Cheng, Yongliang Li, Haoyan Liu, Ying Zan, Yihong Lu, Qingzhu Zhang, Junjie Li, Anyan Du, Zhenhua Wu, Jun Luo, Wenwu Wang

2020Journal of Materials Science Materials in Electronics13 citationsDOI

Topics & Concepts

Materials scienceEtching (microfabrication)NanowireStack (abstract data type)OptoelectronicsElectronic engineeringComposite materialLayer (electronics)Computer scienceProgramming languageEngineeringAdvancements in Semiconductor Devices and Circuit DesignNanowire Synthesis and ApplicationsSemiconductor materials and devices