Nanoindentation testing of Si3N4 irradiated with swift heavy ions
Ekaterina Korneeva, Anel Ibrayeva, A. Janse van Vuuren, Ł. Kurpaska, M. Clozel, K. Mulewska, N.S. Kirilkin, В.А. Скуратов, J.H. Neethling, Maxim V. Zdorovets
Topics & Concepts
NanoindentationIrradiationMaterials scienceFluenceIonIon trackHardening (computing)Swift heavy ionMicrostructureSiliconTransmission electron microscopySilicon nitrideStopping powerNitrideAtomic physicsAnalytical Chemistry (journal)MetallurgyComposite materialChemistryNuclear physicsNanotechnologyPhysicsOrganic chemistryChromatographyLayer (electronics)Ion-surface interactions and analysisDiamond and Carbon-based Materials ResearchIntegrated Circuits and Semiconductor Failure Analysis