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Effect of temperature on the ductile-to-brittle transition in laser-assisted mechanical ruling of silicon

Dong Yao, Guangfeng Shi, Siwei Meng

2024Materials Science in Semiconductor Processing12 citationsDOI

Topics & Concepts

Materials scienceBrittlenessSiliconMetallurgyComposite materialAdvanced Surface Polishing TechniquesForce Microscopy Techniques and ApplicationsLaser Material Processing Techniques
Effect of temperature on the ductile-to-brittle transition in laser-assisted mechanical ruling of silicon | Litcius