3D trenched-electrode pixel sensors: Design, technology and initial results
G. T. Forcolin, M. Boscardin, F. Ficorella, A. Lai, A. Loi, R. Mendicino, S. Ronchin, G.‐F. Dalla Betta
2020Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment17 citationsDOI
Topics & Concepts
PixelCapacitanceTrenchFabricationDot pitchLeakage (economics)ElectrodeComputer scienceWaferElectronic engineeringMaterials scienceOptoelectronicsElectrical engineeringEngineeringNanotechnologyPhysicsArtificial intelligenceMedicinePathologyEconomicsAlternative medicineMacroeconomicsLayer (electronics)Quantum mechanicsCCD and CMOS Imaging SensorsParticle Detector Development and PerformanceRadiation Detection and Scintillator Technologies