Halo-Doped Hetero Dielectric Nanowire MOSFET Scaled to the Sub-10 nm Node

Padakanti Kiran Kumar, B. Balaji, K. Srinivasa Rao

2023Transactions on Electrical and Electronic Materials13 citationsDOI

Topics & Concepts

Materials scienceDielectricQuantum tunnellingDopingNanowireOptoelectronicsMOSFETIonHaloCondensed matter physicsNanotechnologyElectrical engineeringPhysicsTransistorVoltageGalaxyEngineeringQuantum mechanicsSemiconductor materials and devicesAdvancements in Semiconductor Devices and Circuit DesignFerroelectric and Negative Capacitance Devices