Deposition pressure dependent structural and optoelectronic properties of ex-situ boron-doped poly-Si/SiOx passivating contacts based on sputtered silicon
Thien N. Truong, Di Yan, Wenhao Chen, Wenjie Wang, Harvey Guthrey, Mowafak Al‐Jassim, Andrés Cuevas, Daniel Macdonald, Hieu T. Nguyen
Topics & Concepts
Materials scienceSiliconSputteringChemical vapor depositionBoronAmorphous siliconPolycrystalline siliconNanocrystalline siliconAnalytical Chemistry (journal)DopingThin filmOptoelectronicsCrystalline siliconLayer (electronics)NanotechnologyChemistryThin-film transistorOrganic chemistryChromatographySilicon and Solar Cell TechnologiesThin-Film Transistor TechnologiesSilicon Nanostructures and Photoluminescence