Improving the barrier inhomogeneity of 4H-SiC Schottky diodes by inserting Al2O3 interface layer
Ding-kun Shi, Ying Wang, Xue Wu, Zhao-yang Yang, Xingji Li, Jianqun Yang, Fei Cao
Topics & Concepts
Materials scienceSchottky barrierSchottky diodeLayer (electronics)PassivationOptoelectronicsMetal–semiconductor junctionDielectricSemiconductorDiffusion barrierSilicon carbideBarrier layerElectrodeSputteringEpitaxyDiodeComposite materialThin filmNanotechnologyChemistryPhysical chemistrySemiconductor materials and interfacesSilicon Carbide Semiconductor TechnologiesIntegrated Circuits and Semiconductor Failure Analysis