High temperature failure modes of In2O3 thin films and improved thermal stability using Al2O3/ZrO2 protective layers
Xinhang Jin, Binghe Ma, Jinjun Deng, Jian Luo, Weizheng Yuan
Topics & Concepts
Sublimation (psychology)Materials scienceThin filmOxygenThermal stabilityLimitingElectrical resistivity and conductivityComposite materialChemical engineeringNanotechnologyElectrical engineeringPsychologyChemistryOrganic chemistryMechanical engineeringEngineeringPsychotherapistAdvanced Sensor Technologies ResearchElectrical and Thermal Properties of MaterialsScientific Measurement and Uncertainty Evaluation