Stress analysis of circular membrane-type MEMS microphones with piezoelectric read-out
P.G. Ullmann, Christian Bretthauer, Michael L. Schneider, Ulrich Schmid
Topics & Concepts
Materials sciencePiezoelectricityResidual stressMicroelectromechanical systemsFinite element methodMicrophoneStress (linguistics)AcousticsComposite materialMembraneSIGNAL (programming language)ElectrodeSilicon nitrideLayer (electronics)Structural engineeringOptoelectronicsEngineeringComputer sciencePhysicsLinguisticsQuantum mechanicsPhilosophySound pressureProgramming languageGeneticsBiologyAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesMechanical and Optical Resonators