Influence of silicon anisotropy on surface shape deviation of wafer by diamond wire saw
Zongqiang Li, Peiqi Ge, Wenbo Bi, Chengyun Li, Chao Wang, Jianfeng Meng
Topics & Concepts
WaferDiamondMaterials scienceSlicingSiliconAnisotropyCrystal (programming language)Monocrystalline siliconComposite materialOpticsOptoelectronicsMechanical engineeringComputer scienceEngineeringPhysicsProgramming languageAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationDiamond and Carbon-based Materials Research