Preparation of Al2O3 thin films by RS-ALD and edge passivation application for TOPCon half solar cells
Weikang Li, Rong Zhou, Yikai Wang, Qingfeng Su, Jie Yang, Ming Xi, Yongsheng Liu
Topics & Concepts
PassivationEnhanced Data Rates for GSM EvolutionMaterials scienceThin filmChemical engineeringMineralogyMetallurgyNanotechnologyChemistryLayer (electronics)EngineeringTelecommunicationsSilicon and Solar Cell TechnologiesSemiconductor materials and devicesIntegrated Circuits and Semiconductor Failure Analysis