Study on the resistivity and infrared emissivity of TiNx films at different sputtering power
Jie Xu, Miao Gao, Linlin Lu, Yanlong Wang, Xin Liu
Topics & Concepts
Materials scienceSputteringElectrical resistivity and conductivityEmissivityInfraredSputter depositionAnalytical Chemistry (journal)Composite materialThin filmOptoelectronicsOpticsNanotechnologyChemistryElectrical engineeringEngineeringPhysicsChromatographyGaN-based semiconductor devices and materialsMetal and Thin Film MechanicsAcoustic Wave Resonator Technologies