Recent developments and applications of chemical mechanical polishing
Z.W. Zhong
Topics & Concepts
Chemical-mechanical planarizationWaferMaterials scienceAbrasivePolishingSlurrySurface roughnessSurface finishFemtosecondOptoelectronicsMechanical engineeringComposite materialLaserOpticsPhysicsEngineeringAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationLaser Material Processing Techniques