A novel approach to obtain near damage-free surface/subsurface in machining of single crystal 4H-SiC substrate using pure metal mediated friction
Min Wu, Hui Huang, Qiufa Luo, Yueqin Wu
Topics & Concepts
Materials scienceSilicon carbideSilicideSubstrate (aquarium)StackingMetalCrystal (programming language)NickelSiliconCarbideStacking faultSingle crystalOxideMetallurgyComposite materialCrystallographyDislocationChemistryGeologyOceanographyOrganic chemistryProgramming languageComputer scienceAdvanced Surface Polishing TechniquesAluminum Alloys Composites PropertiesDiamond and Carbon-based Materials Research